@Article{UedaSilMarReuSou:2018:ReExPl,
author = "Ueda, M{\'a}rio and Silva, C. and Marcondes, Andr{\'e} Ricardo
and Reuther, H. and Souza, G. B. de",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and HZDR, Rossendorf and {Universidade
Estadual de Ponta Grossa (UEPG)}",
title = "Recent experiments on plasma immersion ion implantation (and
deposition) using discharges inside metal tubes",
journal = "Surface and Coatings Technology",
year = "2018",
volume = "355",
number = "Special",
pages = "98--110",
month = "Dec.",
keywords = "Plasma immersion ion implantation, Sputtering and deposition
inside metallic tubes, Tubes with different dimensions and
configurations, TiN and Ti2N in high temperature PIII.",
abstract = "Plasma immersion ion implantation (PIII) of nitrogen inside
metallic tubes of different diameters and configurations were
attempted recently. PIII tests in practical size metallic tubes of
SS304, ranging from 1.1 to 16 cm empty set and length of 20 cm,
were carried out as a continued effort in our lab, to explore PIII
inside tubes. Tubes in laying down positions and configurations
including metallic lid in one side or both sides open were used,
as well as, plane sample support placed 10 cm far from the tube
mouth and without bias, taking advantage of plasma flowing out the
tube. In particular, nitrogen and argon PIIIs were tested for tube
inner wall sputtering and deposition studies, running the PIII
system in the last configuration of sample support detached from
the tube. During the nitrogen ion implantation runs in other
cases, it was found that the final temperature of the tubes and
the plasma turn-on voltages were both inversely proportional to
the dimensions of the tubes, except for the smallest tube tested.
High voltage glow and hollow cathode discharges were produced
inside the tubes, either alternately, during the pulse or
independently, depending on the tube geometry and pulser used
(LIITS, a current controlled source or RUP-4, a voltage controlled
one). In the case of smallest diameter of 1.1 cm empty set, a
suspended tube of SS304 was tested using lower power pulser
(RUP-4), at its near maximum capability of 1.2 kW. In this case
also, very bright plasmas were formed, mainly inside the tube and
resulted in high temperature there (similar to 700 degrees C).
Nitrogen uptake was superior for higher temperature PIII
treatments (> 700 degrees C), combining ion implantation and
thermal diffusion, which allowed the formation of TiN and Ti2N on
the Ti alloy samples inside tubes with diameters <= 4 cm. In this
paper, detailed discussion of results of above cited PIII tests
with diversified tubes and configurations are presented, together
with the analysis of the corresponding treated surfaces of the
samples inside, outside and on the support detached from the
tube.",
doi = "10.1016/j.surfcoat.2018.05.009",
url = "http://dx.doi.org/10.1016/j.surfcoat.2018.05.009",
issn = "0257-8972",
language = "en",
targetfile = "ueda_recent.pdf",
urlaccessdate = "04 maio 2024"
}